Apr 27th, 2015

18:00-20:00   Registration

Apr 28th, 2015

08:30-09:00   Registration & Welcome Coffee

09:00-09:20   Conference Opening

09:20-10:20   « Printable polymer integrated and free-space optics » by Prof. Dr. Hans Zappe

Session Chair: Marta RENCZ

10:20-10:25   Exhibitor introduction: ScienTec by David Fernandes

10:25-10:50   Coffee break

10:50-12:30   Technical Sessions

10:50-12:30   Device & Components I

Session Chair: Raphael LEVY

• A Novel Multiple-Shell Vibratory Ring Gyroscope
  Ahmed ABDUL-WAHED, Mohamed MAHMOUD (Ain Shams University - Egypt)
• Design of a 3D Multilayer Out-of-plane Overlap Electrostatic Energy Harvesting MEMS for medical implant applications
  Sarah RISQUEZ (Univ. Paris-Sud - France), Marion WOYTASIK (Univ. Paris Sud / CNRS - France), Jie WEI (Univ. Paris Sud - France), Fabien PARRAIN (Institut d'Electronique Fondamentale - France), Elie LEFEUVRE (University of Paris Sud - France)
• An ultra-low-power front-end for differential capacitive sensors
  Patcharee KONGPARK (LIRMM - France), Frederick MAILLY (University of Montpellier - France), Laurent LATORRE (LIRMM - France), Pascal NOUET (University Montpellier - France)
• Integration of commercial microspeakers in an acoustic absorbing liner
  Emile MARTINCIC (Univ. Paris Sud / CNRS - France), Alexandre HOUDOUIN (IEF, Univ. Paris-Sud, UMR CNRS 8622 - France), Stephane DURAND (LAUM - UMR CNRS 6613 - France), Nourdin YAAKOUBI (LAUM, Univ. du Maine, UMR CNRS 6613 - France), Elie LEFEUVRE (University of Paris Sud - France), Yves AUREGAN (LAUM, Univ. du Maine, UMR CNRS 6613 - France)
• MEMS based Inertial Measurement Units
  Gaurav CHATTERJEE (LIRMM - France), Frederick MAILLY (University of Montpellier - France), Pascal NOUET (LIRMM - France), Nacim HACHELEF (Airbus Defence and Space - France), Coumar OUDEA (Airbus Defence and Space - )

10:50-12:30   Integrated processes

Session Chair: Philippe BASSET

• Micro and nanostructured substrates for DNA fibers combing by forced dewetting
  Benoit CHARLOT, Roland TEISSIER (CNRS University Montpellier - France), Etienne SCHWOB (CNRS IGMM - France)
• Screen-printed free-standing piezoelectric devices using low temperature process
  Nursabirah JAMEL, Ahmed ALMUSALLAM, Dibin ZHU, Russel TORAH, Kai YANG, John TUDOR, Steve BEEBY (University of Southampton - United Kingdom)
• Capillary force pumping fluid for glucose oxidase enzymatic fuel cells
  Hsiharng YANG (National Chung Hsing University - Taiwan)
• A compact packaging technique for the integration of ultrasound probes in surgical needles
  Giuseppe SCHIAVONE, Thomas JONES (Heriot-Watt University - United Kingdom), Dennis PRICE (Merlin Circuits - United Kingdom), Rachael MCPHILLIPS, Zhen QIU, Christine DEMORE (University of Dundee - United Kingdom), Yun JIANG (University of Birmingham - United Kingdom), Carl MEGGS (Univeristy of Birmingham - United Kingdom), Syed MAHBOOB (University of Dundee - United Kingdom), Tim BUTTON (University of Birmingham - United Kingdom), Sandy COCHRAN (Univeristy of Birmingham - United Kingdom), Marc DESMULLIEZ (Heriot-Watt university - UK)
• SU-8 microchannels for live cell dielectrophoresis improvements
  Pavel FIKAR (Université Paris Est - France), Gaelle LISSORGUES, Lionel ROUSSEAU (ESIEE Paris - France), Olivier FRANCAIS (ESIEE - Paris - France), Bruno LE PIOUFLE, Feriel S. HAMDI (SATIE/IFR, ENS de Cachan - France), Vjaceslav GEORGIEV (Department of Applied Electronics and Telecommunications in the Faculty of Electrical Engineering, University of West Bohemia, Pilsen 30614, Czech Republic - Czech Republic), Daniel GEORGIEV (Department of Cybernetics in the Faculty of Applied Sciences, University of West Bohemia, Pilsen 30614, Czech Republic - Czech Republic)

12:30-14:00   Lunch

14:00-15:40   Technical Sessions

14:00-15:40   Co-design for MEMS based Smart Systems

Session Chair: Gerold SCHROPFER

• SystemC-AMS/MDVP-based modeling for the virtual prototyping of MEMS applications
  Olivier GUILLAUME, Fabio CENNI, Mario DIAZNAVA (STMicroelectronics - France), Torsten MAEHNE (Sorbonne Universit?s, UPMC Univ Paris 06 - France)
• Co-Design of a MEMS-CMOS Autonomous Switched Oscillator
  Guilherme BRONDANI TORRI (imec / KU Leuven - Belgium), Jan BIENSTMAN, Xavier ROTTENBERG, Harrie TILMANS, Chris VAN HOOF (imec - Belgium), Robert PUERS (KU Leuven, Belgium - Belgium)
• A RF tunable Agile Filter: from component to system design
  Gaelle LISSORGUES (ESIEE Paris - France), Pierre NICOLE (THALES Systèmes Aéroportés - France), Julien PAGAZANI (ESIEE - France), alexandre MEHDAOUI (Coventor, France - France), Gerold SCHROPFER (Coventor - France), Thanh Vinh DINH, Daniel PASQUET (LAMIPS - France)
• New design methodology for MEMS-electronic-package co-design and validation for inertial sensor systems
  Alessandro SANGINARIO (Istituto Italiano di Tecnologia - Italy), alexandre MEHDAOUI (Coventor, France - France), Sarah ZERBINI (STMicroelectronics - Italy), Gerold SCHROPFER (Coventor - France), Danilo DEMARCHI (Istituto Italiano di Tecnologia - Italy)
• System-level design of a readout circuit with thermostatic control for a MEMS pellistor sensor
  Olivier LEMAN, Mangleshwar SRIVASTAVA, Johann HAUER (Fraunhofer IIS - Germany)

14:00-15:40   Manufacturing

Session Chair: Arturo AYON

• A Novel Pneumatic Dispenser Fabrication Technique for Digitally Printing Electroluminescent Lamps on Fabric
  Marc DE VOS, Russel TORAH, John TUDOR (University of Southampton - United Kingdom)
• Optimisation of a Novel Direct-Write Dispenser Printer Technique for Improving Printed Smart Fabric Device Performance
  Zeeshan AHMED, Russel TORAH, John TUDOR (University of Southampton - United Kingdom)
• Quantum Dots/silicon Nanowire Coaxial Photoelectrode-based Dye-sensitized Solar Cells
  You-Dar HSIEH, Che-Wei HSU, Gou-Jen WANG (National Chung-Hsing University - Taiwan)
• CMOS Compatible Pinpointed Fabrication of Nanoscale Silicon Oxide Islands Array
  Tie LI, Pengfei DAI, Na LU, Anran GAO (Shanghai Institute of Microsystem and Information Technology - China), Yuelin WANG (SIMIT, Shanghai, China - China)
• Fabrication of Linear Fresnel Lens Optical Films Using A Micromachined Roller Mould and UV Imprinting Process
  Xuechuan SHAN (SIMTech, Singapore - Singapore)

15:40-16:10   Coffee break

16:10-16:55   Poster introduction

16:10-16:55   CAD Conference & Co-design for MEMS

Session Chair: Romolo MARCELLI

• A FEM Study on Debonding Process for BCB Cap Transfer Packaging
  Seonho SEOK (C2N-Orsay - France)
• A further study of reduced-order modeling techniques for nonlinear MEMS beams
  Jerome JUILLARD (CentraleSupelec - France), Nuria BARNIOL (Universitat Autonoma de Barcelona - Spain), Gabriel VIDAL (Universitat Aut?noma de Barcelona - Spain)
• Optimization of Parameters for CMOS MEMS Resonant Pressure Sensors
  Saoni BANERJI, Jordi MADRENAS (Universitat Politecnica de Catalunya - Spain), Daniel FERNANDEZ (Nanusens - Spain)
• Generation of user-defined input stimuli for virtual prototyping of MEMS sensors applications
  Fabio CENNI, Damien LYONNARD, Erwan AUDOUIN (STMicroelectronics - France), Romain DESTENAY (University of Science and Technology - Korea, Democratic People's Republic of)
• Multiphysical Finite Element Modeling of a Quartz Micro-Resonator Thermal Sensitivity
  Béatrice BOURGETEAU (ONERA - France), Raphael LEVY (Onera - France), Pierrre LAVENUS (ONERA - France)
• SystemC-AMS Simulation of a Biaxial Accelerometer based on MEMS Model Order Reduction
  Benoit VERNAY, Arnaud KRUST, Gerold SCHROPFER (Coventor - France), Fran?ois PECHEUX (UPMC - LIP6 - France), Marie-Minerve LOUERAT (Sorbonne Université - CNRS - France)
• Enabling Smart System Design with the SMAC Platform
  Michelangelo GROSSO (ST-POLITO s.c.ar.l. - Italy), Giuliana GANGEMI, Salvatore RINAUDO (STMicroelectronics s.r.l. - Italy), Marco CREPALDI, Alessandro SANGINARIO, Danilo DEMARCHI (Istituto Italiano di Tecnologia - Italy)
• A Proposed RTL Design Technique for Highly Optimized On-Chip Data Processors of MEMS Sensors
  Peter HORVATH, G?bor HOSSZ?, Ferenc KOV?CS (Budapest University of Technology and Economics - Hungary)
• Modeling of Piezoelectric Excited Millimetric Sized Cantilevers Submerged in fluid using Spectral Element Method: Comparison with Experiments
  Sina ASADI, Mahnaz SHAMSHIRSAZ (Amirkabir University of Technology - Iran, Islamic Republic of), Amir Hossein REZAIE (Amir Hossein - Iran, Islamic Republic of)

16:10-16:55   MIP Conference

Session Chair: Henri CAMON

• Dependence of preferred c-axis orientation on RF Magnetron Sputtering power for AZO/Si acoustic wave devices
  Aliza MD RALIB, Anis NORDIN, Raihan OTHMAN (International Islamic University Malaysia - Malaysia)
• Laser curing of screen and inkjet printed conductors on flexible substrates
  Yang WEI, Russel TORAH, Yi LI, John TUDOR (University of Southampton - United Kingdom)
• STRESS CONTROLLED CMUT FABRICATION BASED ON A CMOS COMPATIBLE SACRIFICIAL RELEASE PROCESS
  Linus ELSAESSER, Anartz UNAMUNO-EGUREN, Martin FRIEDRICHS, Markus KLEMM, Matthias LIST (Fraunhofer IPMS - Germany)
• Low temperature solid-liquid interdiffusion wafer and die bonding based on PVD thin Sn/Cu films
  Sylvain LEMETTRE (C2N Orsay - France), Seonho SEOK (C2N-Orsay - France), Nathalie ISAC (Univ Paris Sud/CNRS - France), Johan MOULIN (Univ. Paris Sud / CNRS - France), Alain BOSSEBOEUF (Center for nanoscience and nanotechnolgy - France)
• Elastic Properties of Graphene Grown by Chemical Vapor Deposition
  Xiao ZHANG, Chen LIANG (Shanghai Institute of Microsystem and Information Technology - China), S?ren ZIMMERMANN, Florian KROHS (University of Oldenburg - Germany), Yuelin WANG (SIMIT, Shanghai, China - China), Tie LI (Shanghai Institute of Microsystem and Information Technology - China)
• Experimental Study on Microfluidic Nanoparticle Immobilization using a Biomimetic Method
  Xiaowen HUANG, Yujiao ZHU, Xuming ZHANG (Hong Kong Polytechnic University - Hong Kong)
• Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter
  Laurie VALBIN, Emmanuelle ALGRE (ESIEE Paris - France), Etienne HERTH, Franck LARDET-VIEUDRIN (FEMTO-ST - France)
• Influence of Nanotexturization, Nanoparticles and CdTe Quantum Dots in the Power Conversion Efficiency of Solar Cells
  Arturo AYON (University of Texas - United States)
• Fabrication of Monolithic Wheatstone Bridge Circuit for Piezoresistive Microcantilever Sensor
  Rosminazuin AB RAHIM (International Islamic University Malaysia - Malaysia), Badariah BAIS, Burhanuddin YEOP MAJLIS (Universiti Kebangsaan Malaysia - Malaysia), Anis NURASHIKIN NORDIN (International Islamic University Malaysia - Malaysia)

17:00-19:00   Poster viewing / Exhibition

19:00-20:00   Sponsors Welcome Reception

Apr 29th, 2015

08:30-09:00   Registration

09:00-10:00   « Opportunities and challenges of Electronic Design Automation of MEMS-ASIC Systems – A system integrator’s perspective» by Dr. Johannes Eisenmenger

Session Chair: Peter SCHNEIDER

10:00-10:30   Coffee break

10:30-11:50   Technical Sessions

10:30-11:50   Measurement

Session Chair: Gaelle LISSORGUES

• FREQUENCY PROFILE MEASUREMENT SYSTEM FOR MICROCANTILEVER-ARRAY BASED GAS SENSOR
  MAIRA ABREU, FARBOD GHASSEMI, Lionel ROUSSEAU (ESIEE - France), Emmanuel SCORSONE (CEA LIST - France), Gaelle LISSORGUES (ESIEE Paris - France), Rafaa MANAI, Philippe BERGONZO (CEA LIST - France)
• A Novel Measurement Method for Liquid Density Sensing Using Piezoelectric Excited Millimetric Sized Sensors
  Sina ASADI, Naserodin SEPEHRY, Mahnaz SHAMSHIRSAZ (Amirkabir University of Technology - Iran, Islamic Republic of), Amir Hossein REZAIE (Amir Hossein - Iran, Islamic Republic of)
• In-situ measurement of nanoparticle quantity in micro-chambers
  Ferenc ENDER, Vit?z ANDR?S (BME - Hungary), Gábor SALLAI (Budapest University of Technology and Economics - Hungary), Di?na WEISER, N?meth M?RTON (BME - Hungary)
• The limiting effect of the electromechanical coupling in self-biased electrostatic vibration energy harvester
  Philippe BASSET (Université Paris-Est - France), Armine KARAMI (Université Paris-Sorbonne / LIP6 - France), Dimitri GALAYKO (LIP6 - France), Frederic MARTY (Esiee - France)

10:30-11:50   RF Devices

Session Chair: Toshihiro ITOH

• A double-pole single-throw latching MEMS switch for reconfigurable distribution frames
  Dries DELLAERT (Ghent University - Belgium), Jan DOUTRELOIGNE (Ghent University - IMEC - Belgium)
• Integrated inductors with one or two magnetic layers
  stephane CAPRARO (Laboratoire Hubert Curien - France), D.D. YAYA, M.K. YOUSSOUF, M. SOULTAN, M.H. BECHIR, J.P. CHATELON, A. SIBLINI (LT2C - France), J.J. ROUSSEAU (LabHC - France)
• Performance analysis of an RF MEMS TPoS Resonator using FE modelling
  Russell FARRUGIA, Ivan GRECH, Owen CASHA, Joseph MICALLEF, Edward GATT (University of Malta - Malta)
• Narrow-band switching by means of triangular meta-material resonators based on RF MEMS cantilevers in CPW configuration
  Emanuela PROIETTI, Romolo MARCELLI, Andrea LUCIBELLO (IMM Roma, Italy - Italy), Giancarlo BARTOLUCCI (University of Roma Tor Vergata - Italy)

11:50-12:35   Poster Introduction

11:50-12:35   CAD Conference

Session Chair: Jerome JUILLARD

• Magnetic inductor model which take into account permeability and loss tangent of the magnetic material
  M.H. BECHIR, D.D. YAYA, F. KAHLOUCHE, M. SOULTAN, M.K. YOUSSOUF (LT2C - France), stephane CAPRARO (Laboratoire Hubert Curien - France), J.P. CHATELON (LT2C - France), J.J. ROUSSEAU (LabHC - France)
• Design of mechanically tunable optical filters with microring resonators
  Dooyoung HAH (Abdullah Gul University - Turkey), John BORDELON (Qualcomm - United States)
• Electromechanical Coupling Characteristics of MEMS Micro Cantilevers with Applications
  Kuo-Shen CHEN (Taiwan - Taiwan)
• Design optimization of Silicon-based MEMS sensors dedicated to bioaerosol monitoring
  Brice BERTHELOT (CSTB - France), Emmanuelle ALGRE (ESYCOM, ESIEE Paris - France)
• Reliability design of thermally actuated MEMS switches supported by V-shape beams
  Marius PUSTAN (Technical University of Cluj-Napoca - Romania), Raluca MULLER (IMT Bucharest - Romania), Radu CHIOREAN (Technical University of Cluj-Napoca - Romania), Angela BARACU (National Institute for R&D in Microtechnologies - IMT Bucharest - Romania), Cristian DUDESCU (Technical University of Cluj-Napoca - Romania), Rodica-Cristina VOICU (National Institute for R&D in Microtechnologies - Romania), Corina BIRLEANU (Technical University of Cluj-Napoca - Romania), Catalin TIBEICA (National Institute for R&D in Microtechnologies - IMT Bucharest - Romania)
• Optimization of Focusing SAW Propagation in Piezoelectric Medium for Microfluidic Applications
  Norazreen ABD AZIZ (UKM - Malaysia), Anis NORDIN (International Islamic University Malaysia - Malaysia), Badariah BAIS, Muhamad Ramdzan BUYONG, Burhanuddin YEOP MAJLIS (UKM - Malaysia)
• Modelling of the flow rate dependent partial thermal resistance of integrated microscale cooling structures
  Gabor TAKACS (Budapest University of Technology and Economics - Hungary), Peter SZABO, Gyorgy BOGNAR (BME - Hungary)
• Frequency Analysis of Electrostatic Cantilever-based MEMS Sensor
  Muhammad SHOAIB (Universiti Teknologi PETRONAS - Malaysia), Nor HISHAM, Noohul BASHEER (Universiti Teknologi Petronas - Malaysia)
• SPATIO-TEMPORAL FLOW PATTERN OBSERVATIONS USING BIO-INSPIRED HAIR FLOW SENSORS
  Ahmad DAGAMSEH (YU - Jordan)

11:50-12:30   MIP Conference

Session Chair: Raluca MULLER

• How to evaluate the reliability of MEMS devices without standards?
  Jeremie DHENNIN, Djemel LELLOUCHI (Fialab - France), Francis PRESSECQ (CNES, Toulouse, France - France)
• Fabrication of fabric LED array
  Seiichi TAKAMATSU, Takahiro YAMASHITA, Toshihiro ITOH (AIST - Japan)
• Development of Battery-less Wireless Current Sensor Node Used in Power Distribution Panel
  Hironao OKADA (National Institute of Advanced Industrial Science and Technology (AIST) - Japan), Toshihiro ITOH (The University of Tokyo - Japan)
• Moisture Sensor feasibility on paper-based substrate
  Mamadou BALDE, Arnaud VENA, Brice SORLI (I.E.S - France)
• Roll-to-Roll Thermal Embossing for Large Area Microstructure Formation and Application
  Xuechuan SHAN (SIMTech, Singapore - Singapore)
• Developing MEMS DC Electric Current Sensor for End-use Monitoring of DC Power Supply: Part V – Corresponding Relationship between Polarization and Output Voltage
  Xu DU (Jilin University - China), Kohei ISAGAWA (Jilin University - ), Takeshi KOBAYASHI (AIST - Japan), Toshihiro ITOH (The University of Tokyo - Japan), Ryutaro MAEDA (UMEMSME/AIST Tsukuba - Japan), Dong F. WANG (Jilin University - China)
• Fabrication, Characterization and Test of acoustic sensors for detection of pollutants in aquatic environments
  LAPEINE DAVID (IES - Institut d'Electronique et des Systemes - France), VERY FLORIAN, LAUX DIDIER, FERRANDIS JEAN-YVES, CHARLOT BENOIT, PASCAL FABIEN, COMBETTE PHILIPPE, GIANI ALAIN (IES - Institut d'Electronique et des Syst?mes - France)

12:35-14:00   LUNCH

14:00-15:00   « Lateral Spreads of Optical MEMS Technology from Fiber Telecom to Biophotonics » by Prof. Dr. Hiroshi Toshiyoshi

Session Chair: Yoshio MITA

15:00-17:00   Poster viewing / Exhibition

17:00-22:00   Social Event

Apr 30th, 2015

08:30-09:00   Registration

09:00-10:40   Technical Sessions

09:00-10:40   Modeling & Simulation

Session Chair: Giorgio DE PASQUALE

• Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses
  Alexis BRENES (THALES Avionics - France), Jerome JUILLARD (CentraleSupelec - France), Laurent BOURGOIS, Filipe VINCI (SUPELEC - France)
• AN INTERFACE CIRCUIT FOR TIME-MULTIPLEXED ELECTROSTATIC DRIVE AND SAMPLE OF ELECTROSTATIC MEMS MIRROR
  Satoshi MARUYAMA (The University of Tokyo - Japan), TOSHIFUMI KONISHI, KATSUYUKI MACHIDA (NTT-AT - Japan), Hiroyuki FUJITA (The University of Tokyo, Japan - Japan), HIROSHI TOSHIYOSHI (The Univeristy of Tokyo - Japan)
• Towards droplet size-aware biochemical application compilation for AM-EWOD biochips
  Mirela ALISTAR, Paul POP (Technical University of Denmark - Denmark)
• Two-phase Taylor-flow reduced order thermal modeling
  Marton NEMETH, Andras POPPE (Budapest University of Technology and Economics - Hungary)
• Pin Count-Aware Biochemical Application Compilation for mVLSI Biochips
  Michael RAAGAARD, Paul POP (Technical University of Denmark - Denmark)

09:00-10:40   Device Manufacturing

Session Chair: Hsiharng YANG

• Wafer level packaging for hermetical encapsulation of MEMS
  Charles-Alix MANIER (Fraunhofer IZM - Germany)
• Dispenser printed proximity sensor on fabric for creative smart fabric applications
  Yang WEI, Russel TORAH, Yi LI, John TUDOR (University of Southampton - United Kingdom)
• MOEMS for near field optical microscopy : from conception to fabrication process challenges
  Pascale GALL-BORRUT, Pascal FALGAYRETTES (Université Montpellier - France), Anna TSIGARA (Université Paris Sud - IEF - France), Benoit B?LIER, Fran?ois MAILLARD (Universit? Paris Sud - IEF - France)
• Visible-light photocatalysis using plasmonic coupling effect for optofluidic microreactors
  Furui TAN, Xuming ZHANG, Ning WANG (The Hongkong Polytechnic University - China)
• Investigation of warpage in wafer-level molding: measurements and FE analysis
  Russell FARRUGIA, Ivan GRECH, Owen CASHA, Joseph MICALLEF, Edward GATT (University of Malta - Malta), Ivan ELLUL, Roseanne DUCA, Ingram BORG (ST Microelectronics Malta - Malta)

10:40-11:10   Coffee break

11:10-12:50   Technical Sessions

11:10-12:50   Device & Components II

Session Chair: Anis NORDIN

• Parylene-C Encapsulation for Polymeric Cantilevers Stability
  Nidhi MAHESHWARI (IIT Bombay - India), Gaurav CHATTERJEE (LIRMM - France), Madhuri VINCHURKAR, Gaurav GUPTA, Hemant KSHIRSAGAR, K.L. NARASIMHAN, V.Ramgopal RAO (IIT Bombay - India)
• Experimental validation of diaphragms for acoustic micro-transducers
  Josu? ESTEVES (TIMA laboratory - France), Giorgio DE PASQUALE (Politecnico di Torino - Italy), Libor RUFER (University Grenoble-Alpes - France), Alexandra KOUMELA (TIMA Lab., Grenoble, France - France), Skandar BASROUR (Université Grenoble Alpes - France), aurelio SOMA (Politecnico di Torino, Italy - Italy)
• A MEMS Micromirror Based Head-Up Display System
  Ridha BEN MRAD, Donn PASILIAO (University of Toronto - Canada)
• A miniature piezoelectric energy harvester for air flows
  Huihui SUN, Dibin ZHU, Neil WHITE, Steve BEEBY (University of Southampton - United Kingdom)
• A miniature vibrating cantilever magnetometer
  Raphael LEVY (Onera - France), patrick KAYSER (ONERA - France), Johan MOULIN (Univ. Paris Sud / CNRS - France), Béatrice BOURGETEAU (ONERA - France)

11:10-12:50   Characterization & Reliability

Session Chair: Francis PRESSECQ

• A Strain-Sensor-Integrated Test Bed for Electro Mechanical Characterization of VLSI Probe
  Ryota SETOGUCHI, Lebrasseur ERIC, Masanori KUBOTA (The University of Tokyo - Japan), Yoshio MITA (Univ. Tokyo Japan - Japan)
• Constant frequency drive architecture for MEMS for improved failure detection and prediction
  Szilard JAMBORHAZI (IEE s.a. - Luxembourg), Marta RENCZ (Budapest University of Technology and Economics - Hungary)
• Cycling reliability of RF-MEMS switches with Gold-Platinum multilayers as contact material
  Romolo MARCELLI (CNR-IMM Roma - Italy), Giorgio DE ANGELIS (University of Roma "Tor Vergata" and CNR-IMM Roma - Italy), Viviana MULLONI, Benno MARGESIN (FBK - Italy), Paola FARINELLI (RF Microtech - Italy)
• Fracture mechanism analysis for stealth dicing applied in wafer expansion
  Wan-Chun CHUANG, Guan-shian LIN (National Sun Yat-sen University - Taiwan), Jeong-Yuan HWANG, Bobby LEE (Advanced Semiconductor Engineering - Taiwan)
• Dielectric Charging Frequency Response of MEMS switches with Insulator-Insulator Contact
  David MOLINERO (Wispry, Inc - United States), Shawn CUNNINGHAM, Dana DEREUS, Art MORRIS (Wispry - United States)

12:50-13:00   Closing Session

13:00-14:30   Lunch

14:30-18:00   Facility Visits at University Montpellier